Metrology
Our expertise includes ultra-precision measurement of regular forms, complex surfaces, micro/nano functional structures, covering the surface profiles, forms, textures and roughness, along with precise process monitoring and control.
Ultra-precision measurement is significant for the development of high-end products. We aim at bridging the state-of-the-art ultra-precision measurement technologies to industrial implementation to achieve accurate manufacturing of complex surfaces and functional structures down to micro/nano scale in mass production.
Ultra-precision measurement includes:
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Customization of ultra-precision measuring system
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Customization of online measuring system
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Online detection of cutting tools profile by microscope imaging
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Detecting of micro vibration of spindle
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High resolution digital imaging by optical microscope
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3D measurement on surface profile, form, texture, roughness
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High resolution surface inspection
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Properties analysis by XPS
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Inspection on microstructures by TEM
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Nano scale surface measurement by AFM